UVA Clean Room Facility
The Virginia Microfabrication Laboratories serve as the University of Virginia's center for research across a broad front of activity in devices, circuits, microsystems, materials and processing methods. The laboratories reside in the University of Virginia's School of Engineering and Applied Science. The UVML replaces the previous AEpL lab structure that was founded in 1967. These activities share a 3,500 square foot clean room facility for microfabrication and materials research as well as a variety of other facilities for nanotechnology, microwave and optical analysis, and device design and testing. The research facilities are maintained and operated by the research staff of the UVML, which includes graduate and undergraduate students, a full-time facilities manager and a full time equipment manager.
- 3500 sq. ft. Cleanroom (class 10,000)
- Lithography (deep-UV, e-beam, FIB)
- Vacuum coaters (sputtering, e-beam)
- Karl Zeiss 982 field emission SEM